Identification and analysis of factors affecting air flow optimization and particle dispersion in clean rooms of electronic industry

Abstract

Clean rooms play an important role in electronics industries, specifically forprecision manufacturing by strictly regulating pollution control, contaminants,and pressure. Airflow design and particle behavior are key determinants ofcontamination control performance in clean rooms. Despite technologicaladvances, suboptimal air distribution remains a major contributor to particledispersion and energy inefficiency. The review systematically examinesexperimental and modeling studies on airflow management and clean roomperformance improvement and their real-world application. A search wasconducted in Scopus, PubMed, and Web of Science using keywords related toclean rooms, air pollution, and airflow. Following Preferred Reporting Itemsfor Systematic reviews and Meta-Analyses (PRISMA) guidelines, studiespublished from 2000 up to November 2025 were screened, and 25 studieswere selected. To improve air flow and pollution control, various factorswere identified along with their strategies and results. The factors identifiedwere classified into four major classifications and their strategies and resultswere analyzed. These classifications included architectural and structuralfactors (e.g., room length, floor height), ventilation and air flow factors (e.g.,velocity, air change rate, fan-filter-unit configuration), environmental andoperational factors (e.g., activity of personnel, SCARA robot, season), andpollutant characteristics (e.g., particle size, and density). Current evidenceindicates that performance improvement of clean rooms requires integratingthese factors into a multi-objective framework balancing cleanliness, energydemand, and process stability. We propose a framework connecting differentparameters to measurable cleanliness and energy efficiency indices